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How to calculate litho hot spot probabilities using Calibre LFD?

Question asked by thirtyeggs on Dec 21, 2016
Latest reply on Jan 10, 2017 by vernon_greer



I guess that Calibre LFD would calculate the litho hot spot probability (the probability that a region could be a litho hot spot) of each region to write a final output. Is there a way to write the probabilities of each region using Calibre LFD?

If so, could you let me know which command I need to use?

Thank you for your help in advance!