I am working with IBM kit 65nm 10LPe. I was told that M1 is changing from Cu to Tungsten that has 6X the resistivity. So, I tried to open the extraction files to look for information about sheet resistance but they are encrypted. So, I have a couple of questions"
1) Is sheet resistance info in extraction files or should it be in tech file (I just guessed it is in the extraction files)? and if not, where should I find it?
2) if it is in the extraction files, is there a way to write a custom extraction file specifically for M1 and include it during extraction?
Any suggestions to resolve that are highly appreciated.