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Question about test patterns generation

Question asked by ielkalio on Jun 5, 2018

Hello,

I am going through many articles about test pattern generations. The last one i went through is "Pattern matching assisted modeling test pattern generation".

I am new to the field of OPC. My understanding is that test pattern is essential for OPC model calibration. I see that many times that test pattern generation is associated with some sorts of pattern matching algorithm. What is referred exactly by test pattern generation? Is it the process of generating the test patterns using the gds layout? And why is it always associated to some sorts of algorithms to define the best test pattern generation?

Thank you,

Ismail

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