Question: What is the file extension of the tanner MEMS output to do 3D analysis?
Are you referring to file extension that is needed for ANSYS? If yes, then it is a .mac file format.
Go 3D Tools > Export 3D Model, in that dialog set the type as .mac file and then hit 'Ok' to export.
Also, feel free to submit a ticket on our support page, if you need help specific to your design: https://support.mentor.com/en/
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