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Needed help with Calibre Workbench and polysilicon layer

Question asked by patil.c.vinay on Apr 12, 2011
Latest reply on Apr 18, 2011 by samantha_lizak

Hello all,

I am new to Calibre Workbench and needed some help with Litho sim for polysilicon layer. I load the optical models ( I use NCSU EDA files) and the layout consisting of polysilicon patterns which I need to simulate. I am not able to get the printed patterns. I tried changing the grid size in the setup to no effect. Any suggestions or link to available tutorials in this regard would be helpful,