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Modifying the resistivity of M1 layer

Question asked by samer1 on Mar 16, 2017
Latest reply on Mar 20, 2017 by samantha_lizak

Hello,

 

I am working with IBM PDK 65nm 10lpe process. We are taping out a chip that will use Al instead of Cu as M1. Accordingly, the resistivity will change. Any ideas how I can modify the resistivity of a layer so that it extraxts correctly?

Thanks

Sherif

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